It is a surface micromachined piezoelectric accelerometer employing a zinc oxide (ZnO) active piezoelectric film.
Curiously, however, the basic properties of these materials (band gap, elastic constants, piezoelectric constants) are not well known.
Measurement Good Practice Guide No. 25 (High field dielectric properties of piezoelectric materials) Buy Online!
The poled microstructure determines the linear elastic, dielectric and piezoelectric moduli.
Piezoelectric materials are the basis of electromechanical devices, and therefore piezoelectric films are especially relevant to micro electro mechanical systems or MEMS.